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Poly-SiGe for MEMS-above-CMOS Sensors

Kristin De Meyer , Pilar Gonzalez Ruiz , Ann Witvrouw

Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS...