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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography


Seongbo Shim , Youngsoo Shin


This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its...

Parution : 2018-03-21
Format(s) : PDF, ePub
Éditeur : Springer
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